Open AccessFRACTURE PREDICTION OF SINGLE CRYSTAL SILICON MEMS UNDER MULTI-AXIAL LOADING
Author(s) -
Alissa Fitzgerald,
David M. Pierce,
Carolyn D. White,
B.M. Huigens,
Jeremy Eaton
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.30
Subject(s) - microelectromechanical systems , silicon , materials science , fracture (geology) , crystal (programming language) , optoelectronics , composite material , structural engineering , computer science , mechanical engineering , engineering , programming language