Open AccessFRACTURE PREDICTION OF SINGLE CRYSTAL SILICON MEMS UNDER MULTI-AXIAL LOADING
Author(s) -
Alissa Fitzgerald,
David M. Pierce,
C.D. White,
Brent M. Huigens,
Jeremy Eaton
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.30
Subject(s) - weibull distribution , microelectromechanical systems , fracture (geology) , materials science , finite element method , structural engineering , test data , computer science , composite material , engineering , optoelectronics , mathematics , programming language , statistics
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