Open AccessAN ULTRA-THIN PACKAGED MEMS OSCILLATOR
Author(s) -
B.H. Stark,
Eric Radza,
Priti Gupta,
J. Sharma,
G. Peramaih,
Shaozhi Deng,
Shich-Chang Suen,
Richard J. Sheridan,
Aaron Partridge,
M. Lutz
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.2
Subject(s) - microelectromechanical systems , wafer , materials science , optoelectronics , resolution (logic) , range (aeronautics) , electrical engineering , computer science , engineering , composite material , artificial intelligence
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