Open AccessDEVELOPMENT OF A FULLY INTEGRATED MICRO-POWER SOURCE BASED ON A MICRO-SILICON FUEL CELL AND A MEMS HYDROGEN GENERATOR
Author(s) -
Lihuang Zhu,
Kai-Ju Lin,
Robert D. Morgan,
H.S. Kim,
Bogdan Gurauꝉ,
D. Kim,
Byungchan Bae,
Richard I. Masel,
Mark A. Shan
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.19
Subject(s) - microelectromechanical systems , fabrication , wafer , silicon , materials science , hydrogen , power density , power (physics) , nanotechnology , optoelectronics , chemistry , physics , organic chemistry , quantum mechanics , medicine , alternative medicine , pathology
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