Open AccessA SURFACE MICROMACHINED CAPACITIVE MICROPHONE FOR AEROACOUSTIC APPLICATIONS
Author(s) -
David T. Martin,
Karthik Kadirvel,
Toshikazu Nishida,
Mark Sheplak
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.18
Subject(s) - capacitive sensing , acoustics , microphone , materials science , surface micromachining , surface (topology) , engineering , electrical engineering , physics , sound pressure , fabrication , geometry , mathematics , medicine , alternative medicine , pathology