Open AccessA MEMS-RELAY FOR MAKE-BREAK POWER SWITCHING APPLICATIONS
Author(s) -
André Weber,
Jeffrey H. Lang,
Alex Slocum
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.14
Subject(s) - relay , microelectromechanical systems , computer science , power (physics) , electrical engineering , electronic engineering , solid state relay , engineering , materials science , optoelectronics , physics , quantum mechanics