Open AccessA MEMS-RELAY FOR MAKE-BREAK POWER SWITCHING APPLICATIONS
Author(s) -
A.C.L. Weber,
Jeffrey H. Lang,
Alex Slocum
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.14
Subject(s) - microelectromechanical systems , deep reactive ion etching , materials science , relay , solid state relay , fabrication , optoelectronics , etching (microfabrication) , electrical engineering , substrate (aquarium) , electrical contacts , silicon , contact resistance , power (physics) , reactive ion etching , engineering , composite material , physics , quantum mechanics , medicine , oceanography , alternative medicine , layer (electronics) , pathology , geology
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