Open AccessELECTROSTATIC-TUNING OF HERMETICALLY ENCAPSULATED COMPOSITE RESONATOR
Author(s) -
H.K. Lee,
Matthew A. Hopcroft,
Renata Melamud,
B. Kim,
J. Salvia,
Saurabh A. Chandorkar,
Thomas W. Kenny
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.13
Subject(s) - resonator , microelectromechanical systems , materials science , compensation (psychology) , composite number , silicon , optoelectronics , voltage , electronic engineering , electrical engineering , engineering , composite material , psychology , psychoanalysis
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