Open AccessINTEGRATION OF A FILM BULK ACOUSTIC RESONATOR WITH MICROFLUIDIC CHANNELS FOR BIOMEDICAL SENSING IN LIQUID
Author(s) -
Wu Xu,
X. Zhang,
Hongyu Yu,
J. Chae,
A. Abbaspour-Tamijani
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.10
Subject(s) - resonator , microfluidics , materials science , parylene , optoelectronics , sensitivity (control systems) , nanotechnology , electronic engineering , polymer , composite material , engineering
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