Open AccessINTEGRATION OF A FILM BULK ACOUSTIC RESONATOR WITH MICROFLUIDIC CHANNELS FOR BIOMEDICAL SENSING IN LIQUID
Author(s) -
WenCheng Xu,
X. Zhang,
Hongyu Yu,
A. Abbaspour-Tamijani,
Junseok Chae
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.10
Subject(s) - microfluidics , resonator , materials science , acoustics , nanotechnology , optoelectronics , electronic engineering , engineering , physics