Open AccessSILICON AS A BIOMEDICAL MATERIAL
Author(s) -
Melissa Ferrari,
Mark MingCheng Cheng,
Ennio Tasciotti
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Portuguese
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.1
Subject(s) - microelectronics , nanotechnology , microfluidics , materials science , nanoporous , biocompatible material , silicon , porous silicon , microelectromechanical systems , engineering , biomedical engineering , optoelectronics
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