Open AccessSILICON AS A BIOMEDICAL MATERIAL
Author(s) -
Melissa Ferrari,
Ming-Ting Cheng,
Ennio Tasciotti
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Portuguese
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.1
Subject(s) - silicon , computer science , materials science , optoelectronics