Open AccessBENCHTOP POLYMER MEMS AS A LOW-COST EDUCATIONAL TOOL
Author(s) -
Mario Urdaneta,
Rémi Delille,
Elisabeth Smela
Publication year - 2006
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006a.4
Subject(s) - microelectromechanical systems , polymer , computer science , materials science , nanotechnology , composite material