Open AccessAN INTERDISCIPLINARY LABORATORY COURSE IN MICROSYSTEM DEVELOPMENT
Author(s) -
K.D. Wise,
K.T. Beach,
T.F. Briggs,
Robert Gordenker,
Melehat Nil Güları
Publication year - 2006
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006a.3
Subject(s) - microsystem , microelectromechanical systems , nmos logic , wafer , pressure sensor , chip , materials science , computer science , electronic engineering , optoelectronics , engineering , electrical engineering , mechanical engineering , nanotechnology , transistor , voltage
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