WHAT SHOULD A FIRST COLLEGE COURSE ON MEMS BE?
Author(s) -
K. Najafi,
Michel M. Maharbiz
Publication year - 2006
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006a.14
Subject(s) - microfabrication , microelectromechanical systems , course (navigation) , microsystem , computer science , curriculum , capacitive sensing , mechanical engineering , surface micromachining , engineering , electrical engineering , nanotechnology , materials science , aerospace engineering , medicine , psychology , pedagogy , alternative medicine , pathology , fabrication
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