Open AccessMICROMANIPULATOR CONTROLLED FABRICATION OF MICRO- AND NANOSCALE POLYMER FIBERS AND APPLICATION AS SACRIFICIAL STRUCTURES IN THE PRODUCTION OF MICROCHANNELS
Author(s) -
Scott M. Berry,
Thomas J. Roussel,
Scott Cambron,
Steven A. Harfenist,
Robert W. Cohn,
Robert Keynton
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.99
Subject(s) - parylene , materials science , stylus , capillary action , fabrication , composite material , coating , polymer , layer (electronics) , nanotechnology , fiber , deposition (geology) , nanoscopic scale , medicine , alternative medicine , pathology , computer science , paleontology , sediment , biology , operating system
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