Open AccessMEMS CANTILEVER BEAM ELECTROSTATIC PULL-IN MODEL
Author(s) -
G.J. O'Brien,
David J. Monk,
Liwei Lin
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.97
Subject(s) - cantilever , microelectromechanical systems , beam (structure) , deflection (physics) , materials science , voltage , conjugate beam method , electrostatics , optics , bending stiffness , structural engineering , physics , optoelectronics , composite material , electrical engineering , engineering , quantum mechanics
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