Open AccessMEMS CANTILEVER BEAM ELECTROSTATIC PULL-IN MODEL
Author(s) -
G.J. O'Brien,
David J. Monk,
Lin Liu
Publication year - 2006
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.97
Subject(s) - cantilever , microelectromechanical systems , beam (structure) , materials science , electrostatics , engineering , structural engineering , mechanical engineering , optoelectronics , physics , quantum mechanics