Open AccessHIGH SPEED DRY ANISOTROPIC ETCHING OF GLASS AND PIEZOCERAMICS FOR MICROSYSTEM APPLICATIONS
Author(s) -
Abhijat Goyal,
Srimath S. Subasinghe,
Vincent Hood,
Srinivas Tadigadapa
Publication year - 2006
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.94
Subject(s) - microsystem , dry etching , materials science , etching (microfabrication) , anisotropy , reactive ion etching , optoelectronics , composite material , nanotechnology , engineering physics , optics , engineering , physics , layer (electronics)