Open AccessEFFECTS OF THE NONLINEAR ELECTROSTATIC ACTUATION FORCE ON THERMOELASTIC DAMPING/QUALITY FACTOR IN MEMS
Author(s) -
Sudipto K. De,
Narayan Aluru
Publication year - 2006
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.91
Subject(s) - thermoelastic damping , microelectromechanical systems , nonlinear system , materials science , quality (philosophy) , mechanics , structural engineering , engineering , physics , thermal , optoelectronics , thermodynamics , quantum mechanics