Open AccessEFFECTS OF THE NONLINEAR ELECTROSTATIC ACTUATION FORCE ON THERMOELASTIC DAMPING/QUALITY FACTOR IN MEMS
Author(s) -
Sudipto K. De,
N. R. Aluru
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.91
Subject(s) - thermoelastic damping , microelectromechanical systems , actuator , magnetic damping , cantilever , nonlinear system , dissipation , damping torque , materials science , quality (philosophy) , mechanics , physics , structural engineering , vibration , acoustics , engineering , voltage , electrical engineering , thermal , optoelectronics , thermodynamics , quantum mechanics , direct torque control , induction motor
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