Open AccessTHERMAL AND MECHANICAL CHARACTERIZATION AND CALIBRATION OF HEATED MICROCANTILEVERS
Author(s) -
Ji Sung Lee,
Thomas Beecham,
K. Park,
Z. Zhang,
Steven Graham,
William P. King
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.86
Subject(s) - cantilever , materials science , characterization (materials science) , silicon , calibration , thermal , microelectromechanical systems , atomic force microscopy , raman spectroscopy , optoelectronics , work (physics) , temperature measurement , nanotechnology , microscope , composite material , optics , mechanical engineering , thermodynamics , physics , statistics , mathematics , engineering
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