Open AccessTEMPERATURE STABLE, POST-PROCESS TUNABLE, HIGH Q HBARS AT 3~5 GHZ
Author(s) -
Hongyu Yu,
H. Zhang,
Weiran Pang,
E.S. Kim
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.85
Subject(s) - resonator , temperature coefficient , fabrication , materials science , q factor , optoelectronics , quality (philosophy) , diaphragm (acoustics) , physics , acoustics , composite material , vibration , medicine , alternative medicine , pathology , quantum mechanics
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