Open AccessMICROFABRICATED PROBES FOR LABORATORY PLASMAS
Author(s) -
J. Stillman,
Franklin Chiang,
Patrick Pribyl,
Mio Nakamoto,
Walter Gekelman,
Jack W. Judy
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.79
Subject(s) - plasma , preamplifier , micrometer , materials science , amplifier , electric field , optoelectronics , ranging , detector , plasma diagnostics , physics , optics , engineering , nuclear physics , telecommunications , cmos , quantum mechanics
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