Open AccessDEVELOPMENT AND CHARACTERIZATION OF HIGH-SENSITIVITY BIOINSPIRED ARTIFICIAL HAIRCELL SENSOR
Author(s) -
N. Chen,
J. Chen,
Jonathan Engel,
Saunvit Pandya,
Charles L. Tucker,
C. Liu
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.72
Subject(s) - sensitivity (control systems) , piezoresistive effect , materials science , deflection (physics) , characterization (materials science) , optoelectronics , acoustics , nanotechnology , electronic engineering , optics , engineering , physics
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