Open AccessDESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROTURBOPUMP FOR A MICRO RANKINE CYCLE MICRO POWER GENERATOR
Author(s) -
C. Lee,
Luc G. Fréchette
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.71
Subject(s) - materials science , wafer , anodic bonding , deep reactive ion etching , turbine , mechanical engineering , rotor (electric) , compressed air , composite material , etching (microfabrication) , optoelectronics , reactive ion etching , engineering , layer (electronics)
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