Open AccessDESIGN & CHARACTERIZATION OF A MEMS THERMAL SWITCH
Author(s) -
Jeong-Hyun Cho,
C. D. Richards,
Jun Jiao,
David F. Bahr,
R. F. Richards
Publication year - 2006
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.70
Subject(s) - microelectromechanical systems , characterization (materials science) , thermal , materials science , computer science , optoelectronics , nanotechnology , physics , meteorology