Open AccessDESIGN & CHARACTERIZATION OF A MEMS THERMAL SWITCH
Author(s) -
J.H. Cho,
C. D. Richards,
Jun Jiao,
David F. Bahr,
R. F. Richards
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.70
Subject(s) - microelectromechanical systems , materials science , fabrication , thermal , carbon nanotube , electrical conductor , characterization (materials science) , thermal resistance , silicon , liquid metal , optoelectronics , thermal conductivity , nanotechnology , composite material , physics , meteorology , medicine , alternative medicine , pathology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom