Open AccessSIS0NIC - THE FIRST COMMERCIALIZED MEMS MICROPHONE
Author(s) -
Peter V. Loeppert,
S.B. Lee
Publication year - 2006
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.7
Subject(s) - microelectromechanical systems , microphone , computer science , acoustics , telecommunications , materials science , physics , optoelectronics , sound pressure