Open AccessSIS0NIC - THE FIRST COMMERCIALIZED MEMS MICROPHONE
Author(s) -
Peter V. Loeppert,
S.B. Lee
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.7
Subject(s) - microelectromechanical systems , electret , microphone , diaphragm (acoustics) , die (integrated circuit) , capacitance , cmos , electrical engineering , electronics , electronic engineering , engineering , computer science , acoustics , materials science , mechanical engineering , optoelectronics , physics , chemistry , electrode , loudspeaker , composite material
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