Open AccessDESENSITIZING METHOD FOR MEASUREMENT OF THIRD-ORDER INTERMODULATION DISTORTION IN CMOS-MEMS MICROMECHANICAL RESONATORS
Author(s) -
Chung-Lun Lo,
Gary K. Fedder
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.69
Subject(s) - resonator , intermodulation , linearity , cmos , materials science , microelectromechanical systems , q factor , physics , optics , optoelectronics , amplifier , quantum mechanics
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