Open AccessDESENSITIZING METHOD FOR MEASUREMENT OF THIRD-ORDER INTERMODULATION DISTORTION IN CMOS-MEMS MICROMECHANICAL RESONATORS
Author(s) -
Chung-Lun Lo,
G.K. Fedder
Publication year - 2006
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.69
Subject(s) - intermodulation , microelectromechanical systems , resonator , distortion (music) , cmos , materials science , third order , electronic engineering , acoustics , optoelectronics , engineering , physics , amplifier , philosophy , theology