Open AccessADHESION AND FRICTION MEASUREMENT METHOD FOR A MEMS PROBE ARRAY
Author(s) -
Winfield Smith,
P.G. Hartwell,
R.G. Walmsley
Publication year - 2006
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.68
Subject(s) - microelectromechanical systems , adhesion , materials science , acoustics , computer science , nanotechnology , composite material , physics