Open AccessADHESION AND FRICTION MEASUREMENT METHOD FOR A MEMS PROBE ARRAY
Author(s) -
Winfield Smith,
P.G. Hartwell,
R.G. Walmsley
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.68
Subject(s) - stiction , laser doppler vibrometer , microelectromechanical systems , adhesion , materials science , radius of curvature , mechanics , curvature , measure (data warehouse) , adhesive , laser doppler velocimetry , acoustics , optics , composite material , nanotechnology , laser , physics , laser beams , computer science , mathematics , database , blood flow , mean curvature , mean curvature flow , geometry , layer (electronics) , medicine
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom