Open AccessA 2-AXIS QUASI-PASSIVE INTEGRATION PLATFORM FOR NANOSCALE PHOTONIC ASSEMBLY
Author(s) -
B. Li,
M. Pietrusky,
A. Sharon
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.57
Subject(s) - photonics , trimming , nanoscopic scale , bandwidth (computing) , computer science , reliability (semiconductor) , optoelectronics , materials science , electronic engineering , optics , engineering , nanotechnology , physics , telecommunications , mechanical engineering , power (physics) , quantum mechanics
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