Open AccessEXPERIMENTAL CHARACTERIZATION OF FREQUENCY DEPENDENT ELECTROSTATIC ACTUATOR FOR AQUEOUS MEDIA
Author(s) -
Vikram Mukundan,
Beth L. Pruitt
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.44
Subject(s) - stiction , actuator , capacitor , materials science , characterization (materials science) , aqueous medium , capacitance , electrostatics , optoelectronics , voltage , electrical engineering , microelectromechanical systems , nanotechnology , aqueous solution , engineering , electrode , chemistry
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