Open AccessA PNEUMATICALLY-ACTUATED MICROVALVE FOR SPATIALLY-SELECTIVE CHEMICAL DELIVERY
Author(s) -
Kyungwon Baek,
Yunpeng Li,
M.N. Gulari,
K.D. Wise
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.41
Subject(s) - body orifice , diaphragm (acoustics) , actuator , materials science , pneumatic actuator , valve actuator , voltage , drug delivery , volumetric flow rate , mechanical engineering , electrical engineering , nanotechnology , mechanics , engineering , physics , loudspeaker
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