Open AccessAN OPTICAL MICROSYSTEM FOR DISPLAYS
Author(s) -
B. Winkler,
Dennis F. Elkins,
Alan Tanner,
Ver W. Ramsey,
R. Cuff,
L. Spangler
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.4
Subject(s) - microsystem , microelectromechanical systems , fabrication , surface micromachining , cmos , chip , integrated circuit , reliability (semiconductor) , electronic circuit , process (computing) , pixel , materials science , computer science , electronic engineering , electrical engineering , engineering , optoelectronics , nanotechnology , computer vision , operating system , medicine , power (physics) , alternative medicine , physics , pathology , quantum mechanics
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