Open AccessMEMS SPATIAL LIGHT MODULATOR FOR OPTICAL MASKLESS LITHOGRAPHY
Author(s) -
Vladimir Aksyuk,
D. López,
George Watson,
M.E. Simon,
R. Cirelli,
F. Pardo,
F. Klemens,
A.R. Papazian,
C. Bolle,
J. E. Bower,
E. Ferry,
William Mansfield,
J.F. Miner,
T. Sorsch,
D. M. Tennant
Publication year - 2006
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.3
Subject(s) - spatial light modulator , maskless lithography , lithography , microelectromechanical systems , materials science , optoelectronics , electron beam lithography , nanotechnology , resist , layer (electronics)