Open AccessMEMS SPATIAL LIGHT MODULATOR FOR OPTICAL MASKLESS LITHOGRAPHY
Author(s) -
Vladimir Aksyuk,
Diego LópezTorres,
G. P. Watson,
M.E. Simon,
R. Cirelli,
F. Pardo,
F. Klemens,
A.R. Papazian,
C. Bolle,
J. E. Bower,
E. Ferry,
W Mansfield,
J.F. Miner,
T. Sorsch,
D. M. Tennant
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.3
Subject(s) - maskless lithography , materials science , spatial light modulator , piston (optics) , surface micromachining , lithography , optoelectronics , microelectromechanical systems , optics , photolithography , layer (electronics) , electron beam lithography , nanotechnology , resist , fabrication , physics , wavefront , medicine , alternative medicine , pathology
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