Open AccessFAST, MEMS-BASED, PHASE-SHIFTING INTERFEROMETER
Author(s) -
Hyuck Choo,
Rishi Kant,
David Garmire,
James Demmel,
Rikky Muller
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.23
Subject(s) - interferometry , astronomical interferometer , transient (computer programming) , frame rate , optics , microelectromechanical systems , actuator , phase (matter) , laser , physics , materials science , optoelectronics , computer science , engineering , electrical engineering , quantum mechanics , operating system
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