Open AccessFAST, MEMS-BASED, PHASE-SHIFTING INTERFEROMETER
Author(s) -
Hyuck Choo,
Rishi Kant,
David Garmire,
James Demmel,
R.S. Muller
Publication year - 2006
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.23
Subject(s) - interferometry , microelectromechanical systems , phase (matter) , computer science , optics , materials science , optoelectronics , physics , quantum mechanics