Open AccessDISSIPATION IN SINGLE-CRYSTAL 3C-SIC ULTRA-HIGH FREQUENCY NANOMECHANICAL RESONATORS
Author(s) -
Philip X.L. Feng,
Christian A. Zorman,
Mehran Mehregany,
M. L. Roukes
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.21
Subject(s) - resonator , dissipation , ultra high frequency , resonance (particle physics) , q factor , materials science , optoelectronics , dissipation factor , physics , electrical engineering , atomic physics , dielectric , engineering , thermodynamics
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