Open AccessHALF-MILLIMETER-RANGE VERTICALLY SCANNING MICROLENSES FOR MICROSCOPIC FOCUSING APPLICATIONS
Author(s) -
Ankur Jain,
Hanyu Xie
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.18
Subject(s) - microlens , materials science , lens (geology) , optics , surface micromachining , focal length , microfabrication , photoresist , optoelectronics , fabrication , millimeter , nanotechnology , physics , medicine , alternative medicine , pathology , layer (electronics)
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