Open AccessOPTIMAL PARAMETERS FOR ARF LASER MICROMACHINING OF SiC AND PZT
Author(s) -
Jean-Philippe Desbiens,
Patrice Masson
Publication year - 2006
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.100
Subject(s) - surface micromachining , materials science , excimer laser , laser , silicon carbide , laser beam machining , laser ablation , silicon , optoelectronics , beam (structure) , optics , laser beams , fabrication , composite material , medicine , physics , alternative medicine , pathology
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