Open AccessOPTIMAL PARAMETERS FOR ARF LASER MICROMACHINING OF SiC AND PZT
Author(s) -
Jean-Philippe Desbiens,
Patrice Masson
Publication year - 2006
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2006.100
Subject(s) - surface micromachining , materials science , laser , optoelectronics , laser beam machining , laser beams , optics , fabrication , medicine , physics , alternative medicine , pathology