Open AccessCOMPENSATED TUNABLE CAPACITIVE THIN FILM HYDROGEN SENSOR
Author(s) -
D. J. Kirby,
J. J. Zinck,
David T. Chang,
F. P. Stratton
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.98
Subject(s) - hydrogen sensor , capacitive sensing , hydrogen , materials science , thin film , partial pressure , lattice (music) , pressure sensor , optoelectronics , response time , analytical chemistry (journal) , electrical engineering , nanotechnology , chemistry , computer science , acoustics , physics , catalysis , engineering , thermodynamics , oxygen , palladium , biochemistry , computer graphics (images) , organic chemistry , chromatography
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