Open AccessCOMPENSATED TUNABLE CAPACITIVE THIN FILM HYDROGEN SENSOR
Author(s) -
D. J. Kirby,
J. J. Zinck,
David T. Chang,
F. P. Stratton
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.98
Subject(s) - capacitive sensing , materials science , hydrogen , optoelectronics , thin film , electrical engineering , nanotechnology , engineering , physics , quantum mechanics