Open AccessHIGH FREQUENCY MICROMECHANICAL PIEZO ACTUATED DISK RESONATOR
Author(s) -
Le Yan,
Wei Pang,
Jian Wu,
William C. Tang,
Eun-Sok Kim
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.96
Subject(s) - resonator , materials science , acoustics , actuator , optoelectronics , electrical engineering , physics , engineering