Open AccessHIGH FREQUENCY MICROMECHANICAL PIEZO ACTUATED DISK RESONATOR
Author(s) -
Le Yan,
Wei Pang,
Jian Wu,
William C. Tang,
E.S. Kim
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.96
Subject(s) - resonator , materials science , fabrication , wafer , silicon on insulator , q factor , optoelectronics , helical resonator , acoustics , radio frequency , substrate (aquarium) , electronic engineering , electrical engineering , silicon , engineering , physics , medicine , oceanography , alternative medicine , pathology , geology
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