Open AccessENHANCEMENT OF DRIVE-MODE BANDWIDTH IN MEMS VIBRATORY GYROSCOPES UTILIZING MULTIPLE OSCILLATORS
Author(s) -
Cenk Acar,
Andrei M. Shkel
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.95
Subject(s) - gyroscope , bandwidth (computing) , surface micromachining , microelectromechanical systems , robustness (evolution) , electronic engineering , vibrating structure gyroscope , silicon on insulator , decoupling (probability) , computer science , control theory (sociology) , engineering , materials science , optoelectronics , control engineering , telecommunications , medicine , biochemistry , chemistry , alternative medicine , control (management) , pathology , fabrication , artificial intelligence , silicon , gene , aerospace engineering
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