Open AccessDRY-RELEASED POST-CMOS COMPATIBLE CONTOUR-MODE ALUMINUM NITRIDE MICROMECHANICAL RESONATORS FOR VHF APPLICATIONS
Author(s) -
Gianluca Piazza,
Albert P. Pisano
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.9
Subject(s) - resonator , materials science , nitride , excited state , cmos , aluminium , radius , optoelectronics , electrical engineering , composite material , physics , layer (electronics) , atomic physics , engineering , computer science , computer security
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