Open AccessDRY-RELEASED POST-CMOS COMPATIBLE CONTOUR-MODE ALUMINUM NITRIDE MICROMECHANICAL RESONATORS FOR VHF APPLICATIONS
Author(s) -
Gianluca Piazza,
Albert P. Pisano
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.9
Subject(s) - resonator , materials science , cmos , aluminium , nitride , optoelectronics , mode (computer interface) , electrical engineering , electronic engineering , composite material , computer science , engineering , layer (electronics) , operating system