Open AccessMICROBOLOMETERS WITH ADAPTIVE DETECTIVITY USING ELECTROSTATIC ACTUATION
Author(s) -
Woosub Song,
Joseph J. Talghader
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.87
Subject(s) - optoelectronics , electrical engineering , computer science , materials science , electronic engineering , engineering