Open AccessLEEDUS: A MICROMACHINING PROCESS FOR DIE-SCALE PATTERN TRANSFER IN CERAMICS WITH HIGH RESOLUTION AND THROUGHPUT
Author(s) -
T. Li,
Yogesh B. Gianchandani
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.84
Subject(s) - materials science , surface micromachining , electroplating , ceramic , machining , die (integrated circuit) , lithography , surface roughness , electrical discharge machining , microelectromechanical systems , microsystem , surface finish , substrate (aquarium) , fabrication , optoelectronics , metallurgy , composite material , nanotechnology , layer (electronics) , medicine , alternative medicine , pathology , oceanography , geology
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