Open AccessLEEDUS: A MICROMACHINING PROCESS FOR DIE-SCALE PATTERN TRANSFER IN CERAMICS WITH HIGH RESOLUTION AND THROUGHPUT
Author(s) -
T. Li,
Yogesh B. Gianchandani
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.84
Subject(s) - die (integrated circuit) , throughput , surface micromachining , ceramic , materials science , process (computing) , scale (ratio) , resolution (logic) , computer science , nanotechnology , metallurgy , fabrication , artificial intelligence , operating system , medicine , alternative medicine , pathology , wireless , physics , quantum mechanics