Open AccessHIGH PERFORMANCE MEMS SENSOR FOR LOW DEW POINT HUMIDITY DETECTION
Author(s) -
A. Zribi,
Aaron Knobloch,
Weiqian Tian,
Christof Schultz
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.80
Subject(s) - materials science , humidity , resistive touchscreen , dew point , microelectromechanical systems , membrane , optoelectronics , water vapor , analytical chemistry (journal) , silicon nitride , conductor , silicon , electrical engineering , composite material , chemistry , chromatography , physics , meteorology , biochemistry , organic chemistry , thermodynamics , engineering
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