Open AccessHIGH PERFORMANCE MEMS SENSOR FOR LOW DEW POINT HUMIDITY DETECTION
Author(s) -
A. Zribi,
Aaron Knobloch,
Weiqian Tian,
Christof Schultz
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.80
Subject(s) - dew point , microelectromechanical systems , humidity , dew , environmental science , point (geometry) , computer science , materials science , optoelectronics , meteorology , physics , condensation , geometry , mathematics