Open AccessA REMOTELY ADJUSTABLE MICROMACHINED CHECK-VALVE WITH A VARIABLE LENGTH CANTILEVER-BEAM STRUCTURE FOR IMPLANTABLE BIOMEDICAL MICROSYSTEMS
Author(s) -
Tingrui Pan,
Babak Ziaie
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.73
Subject(s) - cantilever , microsystem , surface micromachining , microelectromechanical systems , variable (mathematics) , materials science , beam (structure) , optoelectronics , electronic engineering , electrical engineering , engineering , fabrication , nanotechnology , structural engineering , medicine , mathematical analysis , alternative medicine , mathematics , pathology , composite material