Open AccessA REMOTELY ADJUSTABLE MICROMACHINED CHECK-VALVE WITH A VARIABLE LENGTH CANTILEVER-BEAM STRUCTURE FOR IMPLANTABLE BIOMEDICAL MICROSYSTEMS
Author(s) -
Tingrui Pan,
Babak Ziaie
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.73
Subject(s) - cantilever , strips , materials science , microsystem , surface micromachining , substrate (aquarium) , fabrication , optoelectronics , wafer , microelectromechanical systems , silicon , nanotechnology , composite material , medicine , alternative medicine , pathology , oceanography , geology
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