Open AccessEVOLUTION OF INTEGRATED INERTIAL MEMS TECHNOLOGY
Author(s) -
Michael Judy
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.7
Subject(s) - microelectromechanical systems , inertial frame of reference , computer science , systems engineering , aerospace engineering , engineering , materials science , nanotechnology , physics , quantum mechanics