Open AccessEVOLUTION OF INTEGRATED INERTIAL MEMS TECHNOLOGY
Author(s) -
Michael W. Judy
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.7
Subject(s) - microelectromechanical systems , accelerometer , inertial frame of reference , inertial measurement unit , inertial navigation system , fabrication , aerospace engineering , systems engineering , engineering , computer science , materials science , nanotechnology , physics , quantum mechanics , medicine , alternative medicine , pathology , operating system
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