Open AccessFABRICATION AND MEASUREMENT OF AN IC-COMPATIBLE GHZ-RANGE PIEZOELECTRIC LONGITUDINAL BAR RESONATOR
Author(s) -
D.J.D Carter,
Joung-Mo Kang,
Darryl White,
Amy Duwel
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.67
Subject(s) - fabrication , resonator , bar (unit) , piezoelectricity , materials science , optoelectronics , electrical engineering , acoustics , engineering , physics , composite material , medicine , alternative medicine , pathology , meteorology