Open AccessFABRICATION AND MEASUREMENT OF AN IC-COMPATIBLE GHZ-RANGE PIEZOELECTRIC LONGITUDINAL BAR RESONATOR
Author(s) -
D.J.D Carter,
Joung-Mo Kang,
Darryl White,
Amy Duwel
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.67
Subject(s) - resonator , fabrication , materials science , microelectromechanical systems , optoelectronics , bar (unit) , electrical impedance , ranging , wafer , longitudinal mode , piezoelectricity , electrical engineering , acoustics , physics , telecommunications , engineering , medicine , alternative medicine , pathology , meteorology , composite material , wavelength
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