Open AccessA HIGH-Q WIDELY-TUNABLE GIGAHERTZ ELECTROMAGNETIC CAVITY RESONATOR
Author(s) -
Stephen Ming-Chang Hou,
Jeffrey H. Lang,
Alexander H. Slocum,
A. C. Weber,
I.H. White
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.66
Subject(s) - resonator , fabrication , materials science , optoelectronics , helical resonator , dielectric resonator antenna , actuator , wafer , etching (microfabrication) , q factor , radio frequency , piezoelectricity , electrical engineering , engineering , nanotechnology , medicine , alternative medicine , pathology , layer (electronics) , composite material
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