Open AccessPOLY-WIRE-COUPLED SINGLE CRYSTAL SILICON HARPSS MICROMECHANICAL FILTERS USING OXIDE ISLANDS
Author(s) -
Reza Abdolvand,
G.K. Ho,
Farrokh Ayazi
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.64
Subject(s) - materials science , silicon , optoelectronics , oxide , metallurgy