Open AccessPOLY-WIRE-COUPLED SINGLE CRYSTAL SILICON HARPSS MICROMECHANICAL FILTERS USING OXIDE ISLANDS
Author(s) -
Reza Abdolvand,
G.K. Ho,
Farrokh Ayazi
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.64
Subject(s) - materials science , resonator , silicon , substrate (aquarium) , silicon on insulator , coupling (piping) , optoelectronics , thin film , crystal (programming language) , electronic engineering , composite material , nanotechnology , computer science , oceanography , engineering , programming language , geology
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