Open AccessTIP-TILT-PISTON ACTUATORS FOR HIGH FILL-FACTOR MICROMIRROR ARRAYS
Author(s) -
V. Milanović,
G.A. Matus,
Daniel T. McCormick
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.62
Subject(s) - actuator , piston (optics) , deflection (physics) , gimbal , tilt (camera) , materials science , microelectromechanical systems , optics , inertia , rotary actuator , acoustics , optoelectronics , mechanical engineering , physics , engineering , electrical engineering , aerospace engineering , wavefront , classical mechanics
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