Open AccessTIP-TILT-PISTON ACTUATORS FOR HIGH FILL-FACTOR MICROMIRROR ARRAYS
Author(s) -
V. Milanović,
G.A. Matus,
Daniel T. McCormick
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.62
Subject(s) - actuator , tilt (camera) , piston (optics) , materials science , pneumatic actuator , microelectromechanical systems , optics , mechanical engineering , optoelectronics , electrical engineering , engineering , physics , wavefront