Open AccessELECTROTHERMAL SCS MICROMIRROR WITH LARGE-VERTICAL-DISPLACEMENT ACTUATION
Author(s) -
Ankur Jain,
Hongwei Qu,
Shane Todd,
Gary K. Fedder,
Huikai Xie
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.61
Subject(s) - microactuator , bimorph , microelectromechanical systems , materials science , actuator , piston (optics) , voltage , tilt (camera) , displacement (psychology) , optics , deep reactive ion etching , optoelectronics , electrical engineering , engineering , etching (microfabrication) , mechanical engineering , physics , nanotechnology , psychology , psychotherapist , reactive ion etching , layer (electronics) , wavefront
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