Open AccessBULK MICROMACHINED TITANIUM MICROMIRROR DEVICE WITH SLOPING ELECTRODE GEOMETRY
Author(s) -
Masaru P. Rao,
Marco Aimi,
Noel C. MacDonald
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.60
Subject(s) - fabrication , surface micromachining , materials science , titanium , electrode , etching (microfabrication) , bulk micromachining , reactive ion etching , microelectromechanical systems , optoelectronics , silicon , nanotechnology , metallurgy , chemistry , medicine , alternative medicine , pathology , layer (electronics)
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom