Open AccessBULK MICROMACHINED TITANIUM MICROMIRROR DEVICE WITH SLOPING ELECTRODE GEOMETRY
Author(s) -
Masaru P. Rao,
Marco Aimi,
N.C. MacDonald
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.60
Subject(s) - electrode , materials science , titanium , surface micromachining , optics , microelectromechanical systems , optoelectronics , fabrication , physics , metallurgy , medicine , alternative medicine , pathology , quantum mechanics