Open AccessLOW-COST ELECTROPLATED VERTICAL COMB-DRIVE
Author(s) -
Z. Li,
Norman C. Tien
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.59
Subject(s) - electroplating , computer science , automotive engineering , electrical engineering , materials science , engineering , composite material , layer (electronics)