Open AccessLOW-COST ELECTROPLATED VERTICAL COMB-DRIVE
Author(s) -
Z. Li,
N.C. Tien
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.59
Subject(s) - photoresist , electroplating , materials science , actuator , optics , optoelectronics , comb drive , composite material , fabrication , electrical engineering , engineering , layer (electronics) , medicine , physics , alternative medicine , pathology
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