Open AccessSELF-ASSEMBLY OF MICRO PUMPS WITH HIGH UNIFORMITY IN PERFORMANCE
Author(s) -
Jiandong Fang,
K. Wang,
K. F. Böhringer
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.56
Subject(s) - materials science , optoelectronics