Open AccessSELF-ASSEMBLY OF MICRO PUMPS WITH HIGH UNIFORMITY IN PERFORMANCE
Author(s) -
Jiandong Fang,
K. Wang,
K. F. Böhringer
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.56
Subject(s) - materials science , piezoelectricity , substrate (aquarium) , actuator , lubricant , capillary action , silicon , shaker , anodic bonding , optoelectronics , composite material , acoustics , electrical engineering , vibration , oceanography , physics , engineering , geology
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